Design and Simulation of MEMS Based Piezoelectric Accelerometers
Pages : 141-147
MEMS Accelerometer, the new inventions which revolutionized the technical world. Now, it’s time for the self assistive accelerometers. In this paper, we have designed the trampoline, annular diaphragm structured piezoelectric accelerometers using PZT-5H with COMSOL Multiphysics software tool for providing low transverse sensitivity along one axis and good temperature stability. These accelerometers are incorporated into application specific integration circuit (ASIC) and RF telemetry systems to facilitate wireless monitoring of industrial equipment.
Keywords: Accelerometer, Piezoelectric, Piezoelectric lead zirconate titanata (PZT)