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Modelling of Different MEMS Pressure Sensors using COMSOL Multiphysics


Author : Lokesh Singh Panwar, Varij panwar, Sachin Kala and Sushant Sharma

Pages : 243-247
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Abstract

This paper presents the basic introduction of MEMS pressure sensors. The different types of pressure and its operating principles also included. MEMS pressure sensors have widely used in automotive, biomedical and industrial applications. The design and simulation of different pressure sensors such as capacitive, piezoelectric and piezoresistive MEMS pressure sensors are also proposed in this paper. The COMSOL Multiphysics software is used for the designing and simulation of different MEMS Pressure sensors.

Keywords: Pressure sensors, capacitive pressure sensors, piezoresistive pressure sensors, piezoelectric pressure sensors, MEMS

Article published in International Journal of Current Engineering and Technology, Vol.7, No.1 (Feb-2017)

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