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Calculation of Plasma Parameters in Co-Sputtering (Zn:Cu) System using Optical Emission Spectroscopic Technique

Author : Kadhim A. Aadim and Rabah A. H. Edan

Pages : 511-514
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In the present work, we are calculated the parameters of plasma (electron temperature Te, electron density ne, electron velocity ve and ion velocity i) using the optical emission spectroscopic (OES) technique by the spectrometer with wavelength (200 – 1100) nm, that collect the spectrum of plasma. Two cathodes were used (Zn:Cu) metals. In this research argon gas has been used at various values of pressures (0.6, 0.5, 0.4, 0.3, and 0.2 torr).

Keyword: Co-sputtering, OES, Spectroscopy diagnostic

Article published in International Journal of Current Engineering and Technology, Vol.7, No.2 (April-2017)

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